Photosensitive Film for Circuit Formation in Direct Imaging

Photec RD Series

About the product

Resonac’s resist materials for forming printed wiring board circuits are applicable to direct-writing exposure machines that pattern circuits using laser beams.

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Merits

  • Provides excellent shaped resist profiles, and is capable of forming fine-pitch circuits based on film thickness.
  • Responds to circuit formation by semi-additive processing.
  • Applicable to direct-writing exposure machines.

Characteristics

 

(One of our data)

Item Unit RD-3015 RD-3019 RD-3025
Resist thickness µm 15 19 25
Exposure energy mJ/cm2 95 95 85
Recommended step held x/41ST 15 15 15
Adhesion (L/S=x/3x) µm 4 5 7
Resolution (L/S=x/x) µm 4 5 7
  • DE-1 UH was applied(Adtec Engineering Co.,Ltd, 405 nmDI)
    Substrate roughness Ra:0.4 µm
    Post exposure bake (P.E.B) : 80 degree C, 30 Sec. (Box Oven)
    Developer : 1.0 wt% Na2CO3aq., 30 degree C, 0.16 MPa
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Resist profile

RD-3015 (L/S=4 µm /4 µm)

RD-3019 (L/S=5 µm/5 µm)

RD-3025 (L/S=7 µm/7 µm)

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